By Yosi Shacham-Diamand

Abstract

One of the major goals of the RenaChip research program was to develop implantable electrodes with a very small size sensing pads. In this talk we will describe the process related issues of such electrodes and their principle of operation. The electrodes were prepared on both solid substrate (e.g. silicon) and on flexible substrates (e.g. polyimide). In this talk we will describe the process steps, the highlights and the problems of  each process. Finally we will present a preliminary electrical model fro the electrode array, test results and a short discussion of potential improvements.

(a)	(b)

Fig. 1: Microelectrode structure and installation (a) and the 10 electrode sensing array (b).

Yosi Shacham-Diamand
The Bernard L. Schwartz Chair for Nano Scale Information Technologies, Department of Physical Electronics, chair, School of EE, Faculty of Engineering, Vice Dean,, Tel Aviv University,   Tel Aviv 69978, Israel,  email: yosish [at] eng [dot] tau [dot] ac [dot] il